There are various ALD processes for protecting metal parts. Depending on application and required level of protection, either single oxide films, stacked layers or nanolaminates can be used.

Effective Protection Against Corrosion

Metal components are becoming common substrates for atomic layer deposition (ALD) processing demands. Common examples are machinery parts, automotive or aerospace components, pump and compressor parts, and various vessels and containers, which may be exposed to substances and environments that cause wear and corrosion. Such use cases include:

  • Semiconductor manufacturing equipment subjected to corrosive plasmas, gases and chemicals
  • Gas or chemical containers that store corrosive substances
  • Space environments where parts may be exposed to oxidative and/or corrosive ion and plasma bombardment
  • Heavily polluted areas with high levels of acidic or sulfur compounds in the air

Hermetic Encapsulation for Various Sizes and Shapes

ALD is an effective and versatile method for protecting metal parts of various sizes, shapes and use cases against corrosion. ALD thin films form a hermetic encapsulation around the component and cover even the smallest microscale surface details with unmatched conformality and uniformity. The ultra-thin, dense and pinhole-free ALD film does not increase the coated object’s mass or dimensions. As the ALD process takes place at moderate temperatures and from gaseous precursors, it does not cause surface damage to the coated object.

The protection that ALD itself provides can be enhanced by combining ALD with PVD for even stronger protection. PVD forms a thick, crude film on the object’s surface and ALD is then applied to block cracks and pinholes from entering the surface. The ALD film works as a sealant and the PVD film provides the sturdiness and robustness often needed to protect metal machinery parts and other industrial items.