Applied^™ Picosun^™ P-1000

The Applied^™ Picosun^™ P-1000 ALD system is designed for batch coating of various 3D items such as glass panels, mechanical machinery parts, glass or metal sheets, coins, watch parts and jewelry, lenses, optics, and medical devices and implants.

The main applications include various passivation and barrier layers to significantly improve the performance and lifetime of the coated items. The Applied^™ Picosun^™ P-1000 ALD system offers innovative and agile design to enable the highest quality ALD depositions with excellent uniformity, maximum yields, minimum system downtime and low cost-of-ownership with production-proven processes.

Typical Substrate Size and Type

• All kinds of 3-dimensional items such as mechanical machinery parts, glass or metal sheets, coins, watch parts and jewelry, lenses, optics, and medical equipment, surgical implants and implantable devices

Processing Temperature and Capacity

• 50 – 400°C

Typical Processes

• Al₂O₃, ZnO, TiO₂, SiO₂, Y₂O₃

Substrate Loading

• Manual loading with loading accessory (e.g. forklift cart)

Precursors

• Liquid, solid, gas, ozone
• Level sensors, cleaning and refill service
• Up to 7 sources with 6 separate inlets